JPS61196247U - - Google Patents
Info
- Publication number
- JPS61196247U JPS61196247U JP1985079143U JP7914385U JPS61196247U JP S61196247 U JPS61196247 U JP S61196247U JP 1985079143 U JP1985079143 U JP 1985079143U JP 7914385 U JP7914385 U JP 7914385U JP S61196247 U JPS61196247 U JP S61196247U
- Authority
- JP
- Japan
- Prior art keywords
- alignment marks
- pair
- different
- photomask
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000206 photolithography Methods 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985079143U JPS61196247U (en]) | 1985-05-27 | 1985-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985079143U JPS61196247U (en]) | 1985-05-27 | 1985-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61196247U true JPS61196247U (en]) | 1986-12-06 |
Family
ID=30623779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985079143U Pending JPS61196247U (en]) | 1985-05-27 | 1985-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61196247U (en]) |
-
1985
- 1985-05-27 JP JP1985079143U patent/JPS61196247U/ja active Pending
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